Sensor Diaphragm Under Initial Tension: Linear Analysis
نویسنده
چکیده
-In this paper, we present recent efforts conducted to investigate the dynamic behavior of a sensor diaphragm under initial tension. A comprehensive mechanics model based on a plate with in-plane tension is presented and analyzed to examine the transition from plate behavior to membrane behavior. It is shown that for certain tension parameter values, it is appropriate to model the diaphragm as a plate-membrane structure rather than as a membrane. The model predictions are found to compare well with experimental results. The analysis and results should be valuable for carrying out the design of circular sensor diaphragms for various applications. KEY WORDS--Diaphragm, pressure sensor, plate with inplane tension, linear analysis
منابع مشابه
Sensor diaphragm under initial tension: Nonlinear responses and design implications
In this article, recent investigations into the dynamic behavior of a pressure-sensor diaphragm under initial tension are presented. A comprehensive mechanics model based on a plate with in-plane tension is presented and linear analysis is carried out to examine the transition from plate behavior to membrane behavior. It is shown that, for certain tension parameter values, it is appropriate to ...
متن کاملAnalytical Analysis of Capacitive Pressure Sensor with Clamped Diaphragm (RESEARCH NOTE)
Abstract In this paper analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small deflection and the results are evaluated by use of finite element analysis. The central deflection and capacitance values under uniform external pressure are calcula...
متن کاملNew Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملAccurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress
In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...
متن کاملSimulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm
This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...
متن کامل